Evolution of a surface-roughness spectrum caused by stress in nanometer-scale chemical etching

被引:66
作者
Kim, KS [1 ]
Hurtado, JA [1 ]
Tan, H [1 ]
机构
[1] Brown Univ, Div Engn, Providence, RI 02912 USA
关键词
D O I
10.1103/PhysRevLett.83.3872
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
It is reported that a flat Free surface of a stressed solid is configurationally unstable under chemical etching and the surface roughness groups with different rates for different spatial frequencies. The theory described in this Letter predicts that with a shallow chemical etching the roughness with spatial frequency below a critical value grows while the roughness of higher frequency decays. The theory was verified via an atomic force microscope experiment with aluminum. This study provides a simple experimental method to measure stress in metals and ceramics.
引用
收藏
页码:3872 / 3875
页数:4
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