共 16 条
[1]
MONTE-CARLO CALCULATION OF LOW-ENERGY ELECTRON-EMISSION FROM SURFACES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:2057-2060
[4]
DEJAGER PWH, 1997, THESIS DELFT
[5]
HARADA V, 1979, SCAN ELECT MICROSC, V2, P105
[6]
Electron beam induced deposition from W(CO)(6) at 2 to 20 keV and its applications
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1996, 14 (02)
:662-673
[7]
Hübner U, 2001, MICROELECTRON ENG, V57-8, P953, DOI 10.1016/S0167-9317(01)00476-2
[8]
JOY DC, 1994, MC MODELING ELECT MI
[9]
RESOLUTION LIMITS IN ELECTRON-BEAM-INDUCED TUNGSTEN DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1993, 11 (06)
:2219-2223