MONTE-CARLO CALCULATION OF LOW-ENERGY ELECTRON-EMISSION FROM SURFACES

被引：39

作者：

ALLEN, TE

KUNZ, RR

MAYER, TM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584111

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2057 / 2060

页数：4

共 18 条

[1] CALCULATIONS OF MEAN FREE PATHS AND STOPPING POWERS OF LOW-ENERGY ELECTRONS (LESS-THAN-OR-EQUAL-TO 10 KEV) IN SOLIDS USING A STATISTICAL-MODEL [J].

ASHLEY, JC ;

TUNG, CJ ;

RITCHIE, RH ;

ANDERSON, VE .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1976, 23 (06) :1833-1837

[2] ELECTRON INELASTIC MEAN FREE PATHS IN SEVERAL SOLIDS FOR 200 EV LESS-THAN-OR-EQUAL-TO E LESS-THAN-OR-EQUAL-TO 10 KEV [J].

ASHLEY, JC ;

TUNG, CJ .

SURFACE AND INTERFACE ANALYSIS, 1982, 4 (02) :52-55

[3]

BEELER JR, 1983, RAD EFFECTS COMPUTER, P34

[4] METHOD OF DETECTING FINE-STRUCTURE IN SECONDARY-ELECTRON EMISSION YIELD AND APPLICATION TO SI(111) [J].

GOTO, K ;

ISHIKAWA, K .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) :1559-+

[5] ON CONDITIONING - REDUCTION OF SECONDARY-FIELD AND RF-FIELD EMISSION BY ELECTRON, PHOTON, OR HELIUM IMPACT [J].

HALBRITTER, J .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) :6475-6478

[6]

KANAYA K, 1975, SURF SCI, V47, P477

[7] CONTRIBUTION OF BACKSCATTERED ELECTRONS TO SECONDARY ELECTRON FORMATION [J].

KANTER, H .

PHYSICAL REVIEW, 1961, 121 (03) :681-&

[8] HIGH-RESOLUTION ELECTRON-BEAM INDUCED DEPOSITION [J].

KOOPS, HWP ;

WEIEL, R ;

KERN, DP ;

BAUM, TH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01) :477-481

[9] MONTE-CARLO CALCULATION OF LOW-ENERGY SECONDARY-ELECTRON EMISSION FROM METALS [J].

KOSHIKAW.T ;

SHIMIZU, R .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (09) :1303-1315

[10] MONTE-CARLO SIMULATION OF 1-10-KEV ELECTRON-SCATTERING IN A GOLD TARGET [J].

KOTERA, M ;

MURATA, K ;

NAGAMI, K .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (02) :997-1003

← 1 2 →