共 32 条
[1]
ANISOTROPIC ETCHING OF SILICON
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1978, 25 (10)
:1185-1193
[2]
HANNEBORG A, 1985, P 3 INT C SOL STAT S, P186
[3]
AN ELECTROCHEMICAL P-N-JUNCTION ETCH-STOP FOR THE FORMATION OF SILICON MICROSTRUCTURES
[J].
ELECTRON DEVICE LETTERS,
1981, 2 (02)
:44-45
[4]
LAMMERINK T, 1985, P 3 INT C SOL STAT S, P97