Liquid nitrogen cooled sample stage for scanning electron microscopy using a superconducting YBa2Cu3O7-delta shield

被引：7

作者：

Gerber, R ^{[1
]}

Nissel, T ^{[1
]}

Wener, HG ^{[1
]}

Willmann, A ^{[1
]}

Huebener, RP ^{[1
]}

Koelle, D ^{[1
]}

Gross, R ^{[1
]}

机构：

[1] UNIV COLOGNE, INST PHYS 2, LEHRSTUHL ANGEW PHYS, D-50937 COLOGNE, GERMANY

来源：

CRYOGENICS | 1997年 / 37卷 / 01期

关键词：

cryostats; scanning electron microscopy; high T-c superconductivity;

D O I：

10.1016/S0011-2275(96)00104-X

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

We have built a liquid nitrogen cooled low temperature stage for scanning electron microscopes, which is specially designed for the study of high transition temperature (T-c) superconducting devices and circuits in very small and stable magnetic fields. For effective magnetic shielding of the sample we use a superconducting cylindric YBa2Cu3O7-delta shield in addition to several Mumetall shields. Samples can be operated in a temperature range between 77 and 130 K while they are directly irradiated by the electron beam. This setup allows the study of local superconducting properties of high T-c thin film devices or multilayer circuits on a micrometer scare. (C) 1996 Elsevier Science Limited.

引用

页码：21 / 25

页数：5

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