Thermal analysis and simulation of the microchannel flow in miniature thermal conductivity detectors

被引:37
作者
Chen, K
Wu, YE
机构
[1] Univ Utah, Dept Mech Engn, Salt Lake City, UT 84112 USA
[2] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei, Taiwan
关键词
entrance effect; microchannel flow; thermal conductivity detector; thermal simulation;
D O I
10.1016/S0924-4247(99)00287-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The microchannel flow in miniature TCDs (thermal conductivity detectors) was investigated analytically and numerically. Effects of channel size, inlet and boundary conditions, as well as changes in gas properties on the heat transfer rate were examined in detail. Without preheating the gas stream the distance for a miniature TCD to reach the conduction-dominant region was found to be approximately four times the thermal entry length for pipe flows of constant properties and uniform boundary conditions. If the gas temperature at the channel inlet is in the neighborhood of the mean gas temperature in the conduction-dominant region, the entrance region is much shorter. Another important finding of the present study is that the change in heat transfer rate in the entrance region is proportional to the square roots of the changes in gas density, specific heat, and thermal conductivity, but depends primarily on the thermal conductivity change in the conduction-dominant region. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:211 / 218
页数:8
相关论文
共 23 条
[1]  
ANDERSON DA, 1997, COMPUTATIONAL FLUID, P441
[2]  
Arpaci V. S., 1966, CONDUCTION HEAT TRAN, P129
[3]  
BAYAZITOGLU Y, 1988, ELEMENTS HEAT TRANSF, P224
[4]   The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurement [J].
Berberig, O ;
Nottmeyer, K ;
Mizuno, J ;
Kanai, Y ;
Kobayashi, T .
SENSORS AND ACTUATORS A-PHYSICAL, 1998, 66 (1-3) :93-98
[5]   Thermal simulation and characterization of GaAs micromachined power-sensor microsystems [J].
Burian, E ;
Pogany, D ;
Lalinsky, T ;
Seliger, N ;
Gornik, E .
SENSORS AND ACTUATORS A-PHYSICAL, 1998, 68 (1-3) :372-377
[6]  
Daynes H.A., 1933, GAS ANAL MEASUREMENT, P1
[7]  
DeWitt D. W., 1990, INTRO HEAT TRANSFER, P427
[8]   Low power consumption thermal gas-flow sensor based on thermopiles of highly effective thermoelectric materials [J].
Dillner, U ;
Kessler, E ;
Poser, S ;
Baier, V ;
Muller, J .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 60 (1-3) :1-4
[9]   Thermal simulation of a micromachined thermopile-based thin-film gas flow sensor [J].
Dillner, U ;
Kessler, E ;
Poser, S ;
Baier, V ;
Muller, J .
MICROELECTRONICS JOURNAL, 1998, 29 (4-5) :291-297
[10]  
FOWLIS IA, 1996, GAS CHROMATOGRAPHY, P12