Thermal simulation of a micromachined thermopile-based thin-film gas flow sensor

被引:10
作者
Dillner, U [1 ]
Kessler, E [1 ]
Poser, S [1 ]
Baier, V [1 ]
Muller, J [1 ]
机构
[1] Inst Phys High Technol EV, D-07702 Jena, Germany
关键词
D O I
10.1016/S0026-2692(97)00069-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
FEM calculations of a thermal gas flow sensor based on thermopiles made of thin films of Bi0.87Sb0.13 as n-type material and Sb as p-type material are presented. The results of thermal simulations concerning the response of the signal voltage to variations of the now velocity at constant gas temperature as well as to variations of the gas temperature at constant now velocity are compared with experimental data. The good agreement between calculated and experimental results confirms the proposed two-dimensional thermal model. The design as a classical delta-T-type now sensor did not result in a complete suppression of the influence of gas temperature variations to the sensor response. (C) 1998 Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:291 / 297
页数:7
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