SIMULATION OF THE THERMAL-BEHAVIOR OF THERMAL FLOW SENSORS BY EQUIVALENT ELECTRICAL CIRCUITS

The usage of equivalent electrical circuits for the modelling of thermal actions allows the application of standard network simulation programs. This paper shows the analogy between thermal and electrical problems. It presents a method to handle the moving medium using a stationary electrical equivalent circuit by the introduction of controlled current sources. The results of the simulation are compared with measurements made with an integrated Si-based flow sensor built at the Lehrstuhl fur Technische Elektronik, Technische Universitat Munchen.