Plastic masters-rigid templates for soft lithography

被引:75
作者
Desai, Salil P. [1 ]
Freeman, Dennis M. [1 ,2 ]
Voldman, Joel [1 ]
机构
[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
[2] MIT, Harvard Mit Div Hlth Sci & Technol, Cambridge, MA 02139 USA
关键词
FABRICATION; SURFACES; FEATURES;
D O I
10.1039/b822081f
中图分类号
Q5 [生物化学];
学科分类号
070307 [化学生物学];
摘要
We demonstrate a simple process for the fabrication of rigid plastic master molds for soft lithography directly from (poly) dimethysiloxane devices. Plastics masters (PMs) provide a cost-effective alternative to silicon-based masters and can be easily replicated without the need for cleanroom facilities. We have successfully demonstrated the use of plastics micromolding to generate both single and dual-layer plastic structures, and have characterized the fidelity of the molding process. Using the PM fabrication technique, world-to-chip connections can be integrated directly into the master enabling devices with robust, well-aligned fluidic ports directly after molding. PMs provide an easy technique for the fabrication of microfluidic devices and a simple route for the scaling-up of fabrication of robust masters for soft lithography.
引用
收藏
页码:1631 / 1637
页数:7
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