High-accuracy ultrastable moving stage using a novel self-zooming optical scale

被引：15

作者：

Matsumoto, H

Minoshima, K

机构：

[1] Natl. Res. Laboratory of Metrology, Tsukuba, Ibaraki 305

来源：

OPTICS COMMUNICATIONS | 1996年 / 132卷 / 5-6期

关键词：

Common-path interferometer; Dispersion interferometer; Frequency doubling; High-accuracy stage; Picometer;

D O I：

10.1016/0030-4018(96)00532-9

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A high-accuracy ultrastable moving stage with picometer resolution is realised using a novel self-zooming optical scale, which is generated by a new interferometer with two frequency-doubling crystals and was extremely stable because of its common path. The position of a reflecting mirror is controlled by detecting the interference fringe and feeding back the signal to a piezoelectric translator with a resolution of 0.25 nm. Evaluation of the linearity of a conventional linear scale was performed with an accuracy of better than 1 nm.

引用

页码：417 / 420

页数：4

共 5 条

[1] X-RAY OPTICS IN METROLOGICAL APPLICATIONS [J].