Piezoelectric and ferroelectric properties of 1-μm-thick lead zirconate titanate film fabricated by a double-spin-coating process

被引：50

作者：

Park, GT ^{[1
]}

Choi, JJ ^{[1
]}

Park, CS ^{[1
]}

Lee, JW ^{[1
]}

Kim, HE ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Mat Sci & Engn, Seoul 151742, South Korea

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 12期

关键词：

D O I：

10.1063/1.1794354

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lead zirconate titanate (PZT) films were deposited on platinized silicon substrates by spin coating using PZT sols containing polyvinylpyrrolidone (PVP) as an additive. Single-layered 1-mum-thick PZT films with 60/40 composition were fabricated using two successive spin coatings followed by a single heat treatment step. The crack formation was effectively suppressed by the presence of nanosized pores which were generated during the heat treatment. The film has a preferred orientation corresponding to the (100) crystallographic direction. The ferroelectric and piezoelectric properties of the specimen were comparable to those of a film with same composition and thickness but prepared by the conventional sol-gel procedure. (C) 2004 American Institute of Physics.

引用

页码：2322 / 2324

页数：3

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