Fabrication techniques for grating-based optical devices

被引：21

作者：

Lim, MH ^{[1
]}

Murphy, TE ^{[1
]}

Ferrera, J ^{[1
]}

Damask, JN ^{[1
]}

Smith, HI ^{[1
]}

机构：

[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 06期

关键词：

D O I：

10.1116/1.590981

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe a novel, versatile process for fabricating integrated Bragg-grating devices. Our process addresses many of the critical challenges presented by such devices, including period selection, alignment, spatial coherence, and nanolithography. Using a combination of a-beam, x-ray, optical, and interference lithographies, we have successfully employed this process to construct 244 nm period, quarter-wave-shifted Bragg gratings on top of 1-mu m-tall waveguide structures in InP. (C) 1999 American Vacuum Society. [S0734-211X(99)07206-6].

引用

页码：3208 / 3211

页数：4

共 9 条

[1] SPATIAL-PHASE-LOCKED ELECTRON-BEAM LITHOGRAPHY - INITIAL TEST-RESULTS [J].

FERRERA, J ;

WONG, VV ;

RISHTON, S ;

BOEGLI, V ;

ANDERSON, EH ;

KERN, DP ;

SMITH, HI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2342-2345

[2]

FERRERA J, 1994, OPTICAL FIBER COMMUN, V4, P139

[3] THEORY OF CASCADED QUARTER WAVE SHIFTED DISTRIBUTED FEEDBACK RESONATORS [J].

HAUS, HA ;

LAI, Y .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1992, 28 (01) :205-213

[4] NARROW-BAND OPTICAL CHANNEL-DROPPING FILTER [J].

HAUS, HA ;

LAI, Y .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (01) :57-62

[5] COUPLED-WAVE THEORY OF DISTRIBUTED FEEDBACK LASERS [J].

KOGELNIK, H ;

SHANK, CV .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (05) :2327-+

[6] Preservation of rectangular-patterned InP gratings overgrown by gas source molecular beam epitaxy [J].

Koontz, EM ;

Lim, MH ;

Wong, VV ;

Petrich, GS ;

Kolodziejski, LA ;

Smith, HI ;

Matney, KM ;

URen, GD ;

Goorsky, MS .

APPLIED PHYSICS LETTERS, 1997, 71 (10) :1400-1402

[7] Fiber Bragg gratings [J].

Othonos, A .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (12) :4309-4341

[8] SPATIAL-PHASE-LOCKED ELECTRON-BEAM LITHOGRAPHY AND X-RAY-LITHOGRAPHY FABRICATING FIRST-ORDER GRATINGS ON RIB WAVE-GUIDES [J].

WONG, VV ;

FERRERA, J ;

DAMASK, JN ;

CARTER, JM ;

MOON, EE ;

HAUS, HA ;

SMITH, HI ;

RISHTON, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06) :3741-3745

[9] Distributed Bragg grating integrated-optical filters: Synthesis and fabrication [J].

Wong, VV ;

Ferrera, J ;

Damask, JN ;

Murphy, TE ;

Smith, HI ;

Haus, HA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2859-2864

← 1 →