SPATIAL-PHASE-LOCKED ELECTRON-BEAM LITHOGRAPHY AND X-RAY-LITHOGRAPHY FABRICATING FIRST-ORDER GRATINGS ON RIB WAVE-GUIDES

被引：12

作者：

WONG, VV ^{[1
]}

FERRERA, J ^{[1
]}

DAMASK, JN ^{[1
]}

CARTER, JM ^{[1
]}

MOON, EE ^{[1
]}

HAUS, HA ^{[1
]}

SMITH, HI ^{[1
]}

RISHTON, S ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587434

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3741 / 3745

页数：5

共 15 条

[1] METROLOGY OF ELECTRON-BEAM LITHOGRAPHY SYSTEMS USING HOLOGRAPHICALLY PRODUCED REFERENCE SAMPLES
ANDERSON, EH
BOEGLI, V
SCHATTENBURG, ML
KERN, D
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3606 - 3611
[2] LARGE-AREA, FREESTANDING GRATINGS FOR ATOM INTERFEROMETRY PRODUCED USING HOLOGRAPHIC LITHOGRAPHY
CARTER, JM
OLSTER, DB
SCHATTENBURG, ML
YEN, A
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2909 - 2911
[3] DAMASK J, 1993, THESIS MIT
[4] DAMASK JN, 1994, P SOC PHOTO-OPT INS, V2213, P137, DOI 10.1117/12.180956
[5] DRAGONE C, 1991, PHOTON TECH LETT, V3, P813
[6] SPATIAL-PHASE-LOCKED ELECTRON-BEAM LITHOGRAPHY - INITIAL TEST-RESULTS
FERRERA, J
WONG, VV
RISHTON, S
BOEGLI, V
ANDERSON, EH
KERN, DP
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2342 - 2345
[7] NARROW-BAND OPTICAL CHANNEL-DROPPING FILTER
HAUS, HA
LAI, Y
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (01) : 57 - 62
[8] NARROW-BAND RESONANT OPTICAL REFLECTORS AND RESONANT OPTICAL TRANSFORMERS FOR LASER STABILIZATION AND WAVELENGTH DIVISION MULTIPLEXING
KAZARINOV, RF
HENRY, CH
OLSSON, NA
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (09) : 1419 - 1425
[9] PIEZO LOCKING STAGE FOR NANOMETER ELECTRON-BEAM LITHOGRAPHY
KRATSCHMER, E
RISHTON, SA
LUHN, HE
KERN, DP
CHANG, THP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1418 - 1421
[10] MOEL A, 1993, J VAC SCI TECHNOL B, V11, P2194