A lithographic approach to determine volume expansion factors during anodization: Using the example of initiation and growth of TiO2-nanotubes

被引：95

作者：

Berger, Steffen ^{[1
]}

Kunze, Julia ^{[1
]}

Schmuki, Patrik ^{[1
]}

LeClere, Darren ^{[1
]}

Valota, Anna T. ^{[1
]}

Skeldon, Peter ^{[1
]}

Thompson, George E. ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Dept Mat Sci, Inst Surface Sci & Corros LKO, D-91058 Erlangen, Germany

来源：

ELECTROCHIMICA ACTA | 2009年 / 54卷 / 24期

关键词：

Anodic; TiO2; Nanotubes; Growth; Lithography; ANODIC TIO2 NANOTUBES; SENSITIZED SOLAR-CELLS; TITANIUM; FILMS; CONVERSION; OXIDATION; LAYERS; ELECTROLYTES; ALUMINUM; EFFICIENCY;

D O I：

10.1016/j.electacta.2009.05.064

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The present work investigates the formation of nanotubes by anodizing titanium at 20 V in glycerol containing either 0.175 M or 0.35 M NH4F. A photoresist-masking method of thin Ti films allows to use SEM cross-sections to directly obtain information on oxide morphology, layer thickness and metal substrate loss. Therefore not only features of the initial growth stages but also oxide expansion factors can accurately be determined. The expansion factors were found to be similar to 2.4 for the initial formation of a barrier layer, similar to 1.7-1.9 during pore initiation and similar to 2.7-3.1 as the main nanotubes develop. These values (>2.6) suggest substantial contribution to steady state tube growth by a plastic oxide flow mechanism. Combined with RBS efficiency measurements the method presented here allows facile and direct investigation of the mechanism of pore/tube formation. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：5942 / 5948

页数：7

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