High-resolution transmission and scanning electron microscopy of boride-nitride nanostructured films

被引：25

作者：

Andrievskii, RA

Kalinnikov, GV

Shtanskii, DV

机构：

[1] Russian Acad Sci, Inst New Chem Problems, Chernogolovka 142432, Moscow Oblast, Russia

[2] Bardin Cent Res Inst Iron & Steel Ind, Moscow 107005, Russia

[3] Ehime Univ, Dept Mat Sci & Engn, Matsuyama, Ehime 79077, Japan

来源：

PHYSICS OF THE SOLID STATE | 2000年 / 42卷 / 04期

关键词：

D O I：

10.1134/1.1131287

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The results of electron-microscopic studies of grain boundaries and the structure of fractures of titanium boride- and nitride-based films obtained by nonreactive magnetron sputtering are considered. The chemical and phase composition of the films is analyzed with the help of Auger electron spectroscopy and microscopic electron diffraction analysis. The structure of boundaries and the presence of amorphous inclusions, dislocations, and other structural distortions are discussed and the nature of the deformation under indentation is considered. (C) 2000 MAIK "Nauka/ Interperiodica".

引用

页码：760 / 766

页数：7

共 29 条

[1]

ALSHITS VI, 1995, PHYS SOLID STATE, V39

[2]

Andrievski RA, 1998, MATER RES SOC SYMP P, V501, P149

[3] Nanocrystalline borides and related compounds [J].