Investigations of the Surface Chemical Composition and Atomic Structure of ex-situ Sulfur Passivated Ge(100)

被引:5
作者
Fleischmann, C. [1 ]
Sioncke, S. [2 ]
Schouteden, K. [3 ,4 ]
Paredis, K. [1 ]
Beckhoff, B.
Mueller, M. [5 ]
Kolbe, M. [5 ]
Meuris, M. [2 ]
Van Haesendonck, C. [3 ,4 ]
Temst, K. [1 ]
Vantomme, A. [1 ]
机构
[1] Katholieke Univ Leuven, Inst Kern & Stralingsfys, Celestijnenlaan 200D, B-3001 Leuven, Belgium
[2] IMEC, B-3001 Louvain, Belgium
[3] Katholieke Univ Leuven, Lab Vaste Stoffys Magnetisme, B-3001 Leuven, Belgium
[4] Katholieke Univ Leuven, INPAC, B-3001 Leuven, Belgium
[5] Physikalisch Tech Bundesanstalt, D-10587 Berlin, Germany
来源
ANALYTICAL TECHNIQUES FOR SEMICONDUCTOR MATERIALS AND PROCESS CHARACTERIZATION 6 (ALTECH 2009) | 2009年 / 25卷 / 03期
关键词
D O I
10.1149/1.3204433
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Using complementary surface analysis techniques, we have studied the chemical and structural properties of the S/Ge(100) passivation layer formed upon sulfidation in an aqueous (NH4)(2)S solution. Our experiments have revealed that only S-Ge bonds are formed upon the adsorption of S and that the surface is essentially free of other S-containing species (i.e. S-n or SOx). The passivation treatment was found to reduce, but not to fully inhibit Ge-O bonds on the surface. Moreover, we have shown that the top-layer of the passivated surface shows a high degree of disorder even though it is associated with a spotty (1x1) RHEED pattern. Based on our experimental findings, we conclude that the passivation layer can be best described as a thin amorphous GeSxOy film atop a partially ordered interfacial layer, a surface model that has been proposed previously in literature.
引用
收藏
页码:421 / 432
页数:12
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