FIB/HVEM observation of the configuration of cracks and the defect structure near the cracks in Si

被引:25
作者
Saka, H
Abe, S
机构
[1] Department of Quantum Engineering, Nagoya University
来源
JOURNAL OF ELECTRON MICROSCOPY | 1997年 / 46卷 / 01期
关键词
focused ion beam high-voltage electron microscopy; silicon cracks;
D O I
10.1093/oxfordjournals.jmicro.a023489
中图分类号
TH742 [显微镜];
学科分类号
摘要
Cracks were introduced in a Si bulk single crystal by a Vickers indentation and foil specimens which contain the cracks in the plane of foil were prepared using a focused ion beam technique. The configuration of the cracks and the defect structures near the indentation were observed by transmission electron microscopy at 1000 kV. The cracks were classified into two groups, a halfpenny crack and a lateral crack. The emission of dislocations near the crack tips was observed by both an in-situ heating and a post-mortem heating experiment.
引用
收藏
页码:45 / 57
页数:13
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