PLAN-VIEW TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION OF A CRACK-TIP IN SILICON

被引:37
作者
SAKA, H
NAGAYA, G
机构
[1] Department of Quantum Engineering, Nagoya University, Nagoya
关键词
D O I
10.1080/09500839508242459
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A focused-ion-beam system has been applied to prepare a thin foil specimen of silicon which contained cracks in the plane of the foil. It was possible to observe a much larger area at and near a crack tip than has been hitherto possible. The crack formation around a Vickers indent appears to be much more complicated than has been supposed.
引用
收藏
页码:251 / 255
页数:5
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