NiCuZn ferrite thin films grown by a sol-gel method and rapid thermal annealing

被引:36
作者
Liu, Feng [1 ]
Yang, Chen
Ren, Tianling
Wang, A. Z.
Yu, Jun
Liu, Litian
机构
[1] Tsing Hua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] IIT, Dept ECE, Integrated Elect Lab, Chicago, IL 60616 USA
[3] Huazhong Univ Sci & Technol, Inst Microelect, Wuhan 430074, Peoples R China
关键词
Ni0.8-xCu0.2ZnxFe2O4 thin films; sol-gel method; rapid thermal annealing;
D O I
10.1016/j.jmmm.2006.06.014
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ni0.8-xCu0.2ZnxFe2O4 thin films were fabricated by sol-gel method and rapid thermal annealing (RTA). The X-diffraction and atomic force microscopy (AFM) measurements indicate that the films have a single-phase spinel structure with calcining temperature T >= 600 degrees C. The saturation magnetization M-s and coercivity H-c of the films as a function of the film composition were investigated by alternating gradient magnetometer (AGM). It has been found that the MS increases firstly and then decreases with the increasing of Zn content. The MS reaches the maximum value about 271.56 emu/cm(3) for x = 0.45, meanwhile the H-c reaches the minimum value about 15.62 Oe for x = 0.4. The processing parameters were optimized, which includes the coating concentration, the annealing temperature and time for the films. The results indicate that the coating concentration of 0.4 mol/L, crystallization at 600 degrees C and annealing for 5 min are suitable for NiCuZn ferrite thin film. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:75 / 79
页数:5
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