Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation

We analysed the surface of TiN films (similar to2 mum thick) with/without Cl+ implantation by scanning XPS. Both TiN films were subjected to a sliding test by a stainless-steel ball, resulting in round, 150 gm wide scratches on the surface. We examined the difference in chemical composition and chemical state between the worn and the unworn surfaces. On the TiN film without Cl+ implantation, the primary compounds found were TiO2 and TiN with carbon contamination. The friction coefficient was similar to0.8 on this surface. The chemical compound on the worn surface was mainly Fe2O3 with a small amount of TiO2. This suggests that TiN is hard but not lubricative and that elements from the stainless-steel ball adhered to the surface of the TiN film during the sliding test. On the TiN film with Cl+ implantation, the main compound found was TiO2, although we also observed a small amount of TiN. Furthermore, we detected a small amount of Cl, whose chemical state indicated binding with a metal component. The friction coefficient was <0.2 on this surface. The chemical compounds on the worn surface were TiN and TiO2, and no Fe was detected. We could clearly detect TiO2 on the surface of the stainless-steel ball, therefore we concluded that oxidation is enhanced on Cl+ implanted TiN and that titanium oxide functions as a lubricant. During the sliding test, oxidation of the TiN film seemed to continue and titanium oxide was supplied continuously. Copyright (C) 2002 John Wiley Sons, Ltd.