Investigation of the current path of Pb(Zr,Ti)O-3 thin films using an atomic force microscope with simultaneous current measurement

被引：29

作者：

Fujisawa, H ^{[1
]}

Shimizu, M ^{[1
]}

Horiuchi, T ^{[1
]}

Shiosaki, T ^{[1
]}

Matsushige, K ^{[1
]}

机构：

[1] KYOTO UNIV,GRAD SCH ENGN,DEPT ELECT SCI & ENGN,SAKYO KU,KYOTO 60601,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1997年 / 71卷 / 03期

关键词：

D O I：

10.1063/1.119327

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The current path of Pb(Zr,Ti)O-3 thin films was investigated using an atomic farce microscope with simultaneous observations of the surface topography and current measurements using a conductive cantilever. From the current images, it was found that there were some spats where the current flowed relatively easily. By comparing this with the topographic images, these spots were found to be distributed along the grain boundaries-the current barely flowed through the flat surface within the bulk grains. Moreover, the position of these distributed spots did not change even if the value and polarity of the applied voltages were changed. These experimental results indicated that the current flowed through the grain boundaries and that the grain boundary was the current path. (C) 1997 American Institute of Physics.

引用

页码：416 / 418

页数：3

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