Trace element analysis of synthetic mono- and poly-crystalline CaF2 by ultraviolet laser ablation inductively coupled plasma mass spectrometry at 266 and 193 nm

被引:18
作者
Koch, J
Feldmann, I
Hattendorf, B
Günther, D
Engel, U
Jakubowski, N
Bolshov, M
Niemax, K
Hergenröder, R
机构
[1] ISAS, D-44139 Dortmund, Germany
[2] ETH Honggerberg, Inorgan Chem Lab, CH-8093 Zurich, Switzerland
[3] Merch KGaA, Cent Analyt R&D, D-64293 Darmstadt, Germany
[4] Russian Acad Sci, Inst Spect, Troitsk 142190, Moscow Region, Russia
关键词
laser ablation; Nd : YAG; excimer; inductively coupled-plasma mass spectrometry; optical lithography; CaF2;
D O I
10.1016/S0584-8547(02)00033-2
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
The analytical figures of merit for ultraviolet laser ablation-inductively coupled plasma mass spectrometry (UV-LA-ICP-MS) at 266 nm with respect to the trace element analysis of high-purity, UV-transmitting alkaline earth halides are investigated and discussed. Ablation threshold energy density values and ablation rates for mono- and poly-crystalline CaF2 samples were determined. Furthermore, Pb-, Rb-, Sr-, Ba- and Yb-specific analysis was performed. For these purposes, a pulsed Nd:YAG laser operated at the fourth harmonic of the fundamental wavelength (lambda=266 nm) and a double-focusing sector field ICP-MS detector were employed. Depending on the background noise End isotope-specific sensitivity, the detection limits typically varied from 0.7 ng/g for Sr to 7 ng/g in the case of Pb. The concentrations were determined using a glass standard reference material (SRM NIST612). In order to demonstrate the sensitivity of the arrangement described, comparative measurements by means of a commercial ablation system consisting of an ArF excimer laser (lambda = 193 nm) and a quadrupole-type ICP-MS (ICP-QMS) instrument were carried out. The accuracy of both analyses was in good agreement, whereas ablation at 266 nm and detection using sector-field ICP-MS led to a sensitivity that was one order of magnitude above that obtained at 193 nm with ICP-QMS. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1057 / 1070
页数:14
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