Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

被引：44

作者：

Li, LH ^{[1
]}

Zhang, HQ

Zhang, YH

Chu, PK

Tian, XB

Xia, LF

Ma, XX

机构：

[1] Beijing Univ Aeronaut & Astronaut, Dept 702, Sch Mech Engn & Automat, Beijing 100083, Peoples R China

[2] City Univ Hong Kong, Dept Phys & Mat Sci, Kowloon, Hong Kong, Peoples R China

[3] Harbin Inst Technol, Mat Sci & Engn Sch, Harbin 150001, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2002年 / 94卷 / 01期

关键词：

diamond-like carbon films; hardness; Raman spectroscopy; X-ray photoelectron spectroscopy;

D O I：

10.1016/S0921-5107(02)00079-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) films were deposited using metal are under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp(3) structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp(3) structures may exhibit similar D Raman peaks. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：95 / 101

页数：7

共 23 条

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