A process for close control of primary particle size morphology and crystallinity of flame made nanoparticles is presented. According to this freshly made titania aerosol nanoparticles are rapidly quenched in a critical flow nozzle essentially freezing particle growth at desired levels. The nanoparticles are produced in a methane/oxygen diffusion flame reactor by oxidation of titanium tetra isopropoxide (TTIP). Precise control of the average primary particle size reduced agglomeration and phase composition is achieved by positioning of the quenching nozzle above the burner and controlling gas and precursor flow rates. (C) 2002 Elsevier Science B.V. All rights reserved.