Effect of laser energy density on the fabrication of Ba2NaNb5O15 thin films by pulsed laser ablation

被引：5

作者：

Ando, S ^{[1
]}

Konakahara, K ^{[1
]}

Okamura, S ^{[1
]}

Tsukamoto, T ^{[1
]}

机构：

[1] SCI UNIV TOKYO,FAC SCI & ENGN,DEPT ELECT & COMP SCI,YAMAGUCHI 756,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 9B期

关键词：

ferroelectric; Ba2NaNb5O15; thin film; pulsed laser ablation; laser energy density; chemical composition; X-ray diffraction; surface morphology; hysteresis loop;

D O I：

10.1143/JJAP.36.5925

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ferroelectric thin films of barium sodium niobate, Ba2NaNb5O15 (BNN), were prepared on Pt substrates by pulsed laser ablation at O-2 gas pressures of 0.01 and 0.1 Torr. We examined the effect of laser energy density on the fabrication of BNN thin films. The laser energy density was changed from 1.67 J/cm(2) to 5.0 J/cm(2). On increasing laser energy density, the chemical composition of thin films approached the BNN stoichiometry. Crystallinity of BNN thin films fabricated at higher laser energy densities developed a tendency to orient along the c-axis. Thin films of BNN deposited at an O-2 gas pressure of 0.1 Torr and a laser energy density of 5.0 J/cm(2) have a stoichiometoric composition and a prominent c-axis orientation with a remanent plarization P-r of 0.8 mu C/cm(2) and a coercive field E-c of 24.0 kV/cm at room temperature.

引用

页码：5925 / 5929

页数：5