Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion

被引：20

作者：

Akiyama, T ^{[1
]}

Staufer, U ^{[1
]}

de Rooij, NF ^{[1
]}

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 21期

关键词：

D O I：

10.1063/1.126549

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A microfabricated cantilever with integrated comb-shape electrostatic actuator is proposed to yield a high-speed feedback motion in atomic force microscopy with optical deflection detection. The actuator has a linear response to the driving voltage. The dynamic range of tip amounts to 1 mu m with an actuation efficiency of 11.4 nm/V. Using this cantilever, an imaging bandwidth of similar to 80 kHz was obtained. High-speed constant force imaging with a tip velocity of 1.22 mm/s is demonstrated. The tip-sample force is verified to be constant by using a cantilever with an integrated piezoresistor as the scanned sample. (C) 2000 American Institute of Physics. [S0003-6951(00)05321-3].

引用

页码：3139 / 3141

页数：3

共 12 条

[1]

AKIYAMA T, 1999, P TRANSD 99 SEND JAP, P1848

[2] Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors [J].

Blanc, N ;

Brugger, J ;

deRooij, NF ;

Durig, U .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (02) :901-905

[3]

Brugger J., 1992, Journal of Micromechanics and Microengineering, V2, P218, DOI 10.1088/0960-1317/2/3/026

[4] APPLICATION OF LEAD-ZIRCONATE-TITANATE THIN-FILM DISPLACEMENT SENSORS FOR THE ATOMIC-FORCE MICROSCOPE [J].

FUJII, T ;

WATANABE, S ;

SUZUKI, M ;

FUJIU, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (03) :1119-1122

[5]

ITOH T, 1995, P TRANSD 95 STOCKH A, V4, P632

[6] INTEGRATED ELECTROSTATICALLY RESONANT SCAN TIP FOR AN ATOMIC-FORCE MICROSCOPE [J].

KONG, LC ;

ORR, BG ;

WISE, KD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (03) :634-641

[7] Parallel scanning AFM with on-chip circuitry in CMOS technology [J].

Lange, D ;

Akiyama, T ;

Hagleitner, C ;

Tonin, A ;

Hidber, HR ;

Niedermann, P ;

Staufer, U ;

de Rooij, NF ;

Brand, O ;

Baltes, H .

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :447-452

[8]

Manalis SR, 1996, APPL PHYS LETT, V68, P871, DOI 10.1063/1.116528

[9] High-speed atomic force microscopy using an integrated actuator and optical lever detection [J].

Manalis, SR ;

Minne, SC ;

Atalar, A ;

Quate, CF .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (09) :3294-3297

[10] Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators [J].

Minne, SC ;

Manalis, SR ;

Quate, CF .

APPLIED PHYSICS LETTERS, 1995, 67 (26) :3918-3920

← 1 2 →