A MEMS-based variable micro-lens system

被引：95

作者：

Krogmann, F. ^{[1
]}

Moench, W. ^{[1
]}

Zappe, H. ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn IMTEK, D-7800 Freiburg, Germany

来源：

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS | 2006年 / 8卷 / 07期

关键词：

electro-wetting; liquid lens; micro-lens; variable lens; optical fluids; micro-opto-electro-mechanical systems; silicon technology; centring structure;

D O I：

10.1088/1464-4258/8/7/S06

中图分类号：

O43 [光学];

学科分类号：

070207 [光学]; 0803 [光学工程];

摘要：

We present a tunable liquid micro-lens system exhibiting a tuning range of back focal length between 2.3 mm and infinity achieved by applying a voltage of 0-45 V. The lens actuation mechanism is based on electro-wetting on dielectrics (EWOD) and the system is fabricated in MEMS technology. In this system, two density-matched optical fluids are located in a centring structure which was defined by an anisotropic etching process. The system design provides an initial back focal length of a few millimetres and is robust against shocks and vibrations.

引用

页码：S330 / S336

页数：7

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