Fabrication and testing of micro-lens arrays by all-liquid techniques

被引:45
作者
Moench, W [1 ]
Zappe, H [1 ]
机构
[1] Univ Freiburg, Inst Microsyst Technol, Lab Microopt, D-79110 Freiburg, Germany
来源
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS | 2004年 / 6卷 / 04期
关键词
polymer optical fibres; polymer waveguides; polymer micro-lens arrays; refractive index; mechanical properties; hardness; elastic modulus; glass transition temperature; surface energy;
D O I
10.1088/1464-4258/6/4/007
中图分类号
O43 [光学];
学科分类号
070207 [光学]; 0803 [光学工程];
摘要
Various all-liquid fabrication strategies to construct polymer micro-lens arrays on glass substrates are presented. Wettability patterns were made on glass substrates and a monomer was deposited selectively on circular domains on the substrate by making use of the hydrophobic effect, resulting in liquid micro-lenses. The liquid micro-lenses were solidified by polymerization. Three different variations of the selective wetting process were developed. The polymer micro-lenses were characterized extensively by optical methods: focal length, surface roughness and optical aberrations of the lenses were determined by scanning white light interferometry. Due to their fabrication from the liquid phase, the root-mean-square surface roughness of the micro-lenses is between 10 and 35 nm, i.e. better than 1/10 wavelength. These measurements allowed comparison of the quality of lenses fabricated by these techniques.
引用
收藏
页码:330 / 337
页数:8
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