共 25 条
[3]
Surface micromachined devices for microwave and photonic applications
[J].
OPTOELECTRONIC MATERIALS AND DEVICES,
1998, 3419
:214-226
[7]
HANEY MW, 2000, OSA TRENDS OPTICS PH, V41, P266
[10]
JEANLOUIS B, 1999, PHYS REV LETT, V82, P4671