Highly uniform vertical-cavity surface-emitting lasers integrated with microlens arrays

被引：51

作者：

Eitel, S ^{[1
]}

Fancey, SJ

Gauggel, HP

Gulden, KH

Bächtold, W

Taghizadeh, MR

机构：

[1] Ctr Suisse Elect & Microtech SA, CH-8048 Zurich, Switzerland

[2] ETH Zurich, Swiss Fed Inst Technol, Dept Elect Engn, CH-8092 Zurich, Switzerland

[3] Heriot Watt Univ, Dept Phys, Edinburgh EH14 4AS, Midlothian, Scotland

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2000年 / 12卷 / 05期

关键词：

microlens arrays; optical interconnections; vertical-cavity surface-emitting lasers;

D O I：

10.1109/68.841252

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, work is described on the fabrication of highly uniform 8 x 8 arrays of GaAs-AlGaAs vertical-cavity surface-emitting lasers (VCSEL's), Oxide-confined VCSEL arrays show an average threshold current of 0.74+/-0.02 mA, an average output power of 2.05+/-0.03 mW at 8 mA and an average power conversion efficiency of 14.3%, Their wavelength is measured to be 967+/-0.35 nm over the array. In addition, we describe the alignment and integration of these device arrays with arrays of refractive microlenses to allow beam shaping typically required in system applications.

引用

页码：459 / 461

页数：3

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