Simple reflow technique for fabrication of a microlens array in solgel glass

被引：68

作者：

He, M ^{[1
]}

Yuan, XC ^{[1
]}

Ngo, NQ ^{[1
]}

Bu, J ^{[1
]}

Kudryashov, V ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

OPTICS LETTERS | 2003年 / 28卷 / 09期

关键词：

D O I：

10.1364/OL.28.000731

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A simple reflow method for fabrication of refractive microlens arrays in inorganic-organic SiO2-ZrO2 solgel glass is presented. To our knowledge, this is the first report that presents a simple reflow technique for transforming a negatively induced hybrid solgel material into desirable spherical microlenses. It is shown that the microlenses have excellent smooth surfaces and uniform dimensions. The reflow technique is considerably cheaper than use of a high-energy beam-sensitive gray-scale mask and is suitable for mass production. (C) 2003 Optical Society of America.

引用

页码：731 / 733

页数：3

共 9 条

[1] Technique for monolithic fabrication of silicon microlenses with selectable rim angles
Erdmann, L
Efferenn, D
[J]. OPTICAL ENGINEERING, 1997, 36 (04) : 1094 - 1098
[2] EUGENE H, 2002, OPTICS, P243
[3] Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method
Kintaka, K
Nishii, J
Tohge, N
[J]. APPLIED OPTICS, 2000, 39 (04) : 489 - 493
[4] Direct laser writing of surface reliefs in dry, self-developing photopolymer films
Neumann, J
Wieking, KS
Kip, D
[J]. APPLIED OPTICS, 1999, 38 (25) : 5418 - 5421
[5] TECHNIQUE FOR MONOLITHIC FABRICATION OF MICROLENS ARRAYS
POPOVIC, ZD
SPRAGUE, RA
CONNELL, GAN
[J]. APPLIED OPTICS, 1988, 27 (07): : 1281 - 1284
[6] Sol-gel hybrid glass diffractive elements by direct electron-beam exposure
Rantala, JT
Nordman, N
Nordman, O
Vahakangas, J
Honkanen, S
Peyghambarian, N
[J]. ELECTRONICS LETTERS, 1998, 34 (05) : 455 - 456
[7] Development of the SC-RTA process for fabrication of sol-gel based silica-on-silicon integrated optic components
Syms, RRA
Holmes, AS
Huang, W
Schneider, VM
Green, M
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1998, 13 (1-3) : 509 - 516
[8] REFLOW AND BURIAL OF CHANNEL WAVE-GUIDES FORMED IN SOL-GEL GLASS ON SI SUBSTRATES
SYMS, RRA
HOLMES, AS
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1993, 5 (09) : 1077 - 1079
[9] Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask
Yuan, XC
Yu, WX
Ngo, NQ
Cheong, WC
[J]. OPTICS EXPRESS, 2002, 10 (07): : 303 - 308

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