Front-illuminated-full-frame charge-coupled device image sensor achieves 85% peak quantum efficiency

被引:5
作者
Ciccarelli, A [1 ]
Davis, B [1 ]
Jardin, WD [1 ]
Doan, H [1 ]
Meisenzahl, E [1 ]
Pace, L [1 ]
Putnam, G [1 ]
Shepherd, J [1 ]
Stevens, E [1 ]
Summa, J [1 ]
Wetzel, K [1 ]
机构
[1] Eastman Kodak Co, Rochester, NY 14650 USA
来源
SENSORS AND CAMERA SYSTEMS FOR SCIENTIFIC, INDUSTRIAL, AND DIGITAL PHOTOGRAPHY APPLICATIONS III | 2002年 / 4669卷
关键词
D O I
10.1117/12.463447
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A high sensitivity front-illuminated charge-coupled device (CCD) technology has been developed by combining the transparent gate technology introduced by Kodak in 1999 with the microlens technology usually employed on interline CCDs. In this new architecture, the microlens is used to focus the incoming light onto the more transparent of the two electrodes. The new sensors offer significant increases in quantum efficiency while maintaining the performance advantages of front-illuminated full-frame CCDs including 3 pA/cm(2) typical dark current at 25degrees C, and 55 ke full well in a 6.8 mum pixel.
引用
收藏
页码:153 / 160
页数:8
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