Guided-wave optics in silicon-on-insulator technology

被引：20

作者：

Jalali, B

Trinh, PD

Yegnanarayanan, S

Coppinger, F

机构：

[1] Department of Electrical Engineering, University of California at Los Anceles, Los Anaeles

来源：

IEE PROCEEDINGS-OPTOELECTRONICS | 1996年 / 143卷 / 05期

关键词：

silicon-on-insulator; optoelectronic devices; multiplexing; rib waveguides;

D O I：

10.1049/ip-opt:19960675

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon-on-insulator (SOI) technology offers tremendous potential for the integration of optoelectronic functions on a silicon substrate. The authors have demonstrated integrated 3 dB optical directional couplers, a 5 x 9 star coupler, and a Mach-Zehnder wavelength demultiplexer using SOI rib waveguides. These devices show excellent performance characteristics and represent key components for the realisation of monolithic optoelectronic circuits in a silicon IC-compatible technology.

引用

页码：307 / 311

页数：5

共 17 条

[1]

DONATI S, 1993, P SOC PHOTO-OPT INS, V1849, P54, DOI 10.1117/12.147079

[2]

Dragone C., 1989, IEEE Photonics Technology Letters, V1, P241, DOI 10.1109/68.36055

[3] EFFICIENT N X N STAR COUPLERS USING FOURIER OPTICS [J].