LOW-LOSS PLANAR OPTICAL WAVE-GUIDES FABRICATED IN SIMOX MATERIAL

被引：64

作者：

RICKMAN, A

REED, GT

WEISS, BL

NAMAVAR, F

机构：

[1] SPIRE CORP,DIV THIN FILMS,BEDFORD,MA 01730

[2] UNIV SURREY,DEPT PHYS,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1992年 / 4卷 / 06期

关键词：

Buried Oxide Layers - SIMOX Structures;

D O I：

10.1109/68.141992

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss has been studied. Waveguides with guiding layer thickness of approximately 6-mu-m have been measured, and a lowest loss, which is of the order of that of pure silicon, was observed for a buried oxide thickness of 0.4-mu-m, at a measurement wavelength of 1.523-mu-m.

引用

页码：633 / 635

页数：3

共 11 条

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