High-performance MRAM technology with an improved magnetic tunnel junction material

被引:14
作者
Motoyoshi, M [1 ]
Moriyama, K [1 ]
Mori, R [1 ]
Fukumoto, C [1 ]
Itoh, R [1 ]
Kano, R [1 ]
Bessho, K [1 ]
Narisawa, H [1 ]
机构
[1] Sony Corp, SNC, LSI Technol Dev Div, Yokohama, Kanagawa, Japan
来源
2002 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS | 2002年
关键词
D O I
10.1109/VLSIT.2002.1015457
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work is a report on high-performance MRAM Technology. 0.4 x 0.8 um(2) MTJ elements were successfully integrated with 0.35 um CMOS technology without process-induced damages. A magnetoresistance (MR) ratio of more than 55% and the read/write operating point were obtained by introducing an improved magnetic tunnel junction (MTJ) material. The short-pulse writing in combination with an improved cell structures suggest that MRAM has a great deal of potential for low power applications.
引用
收藏
页码:212 / 213
页数:2
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