Micromachining of quartz with ultrashort laser pulses

被引：238

作者：

Varel, H

Ashkenasi, D

Rosenfeld, A

Wahmer, M

Campbell, EEB

机构：

[1] Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, D-12474 Berlin

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1997年 / 65卷 / 4-5期

关键词：

D O I：

10.1007/s003390050593

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Well-defined and highly reproducible channels of a few micrometres diameter and lengths of over 1 mm have been produced in quartz with laser pulses of 790 nm wavelength (Ti:sapphire) and pulse lengths of 100-200 fs. The channel depth can be controlled by the laser fluence and number of laser shots. Comparisons were made with laser pulse lengths of 1.3 ps, 2.8 ps, 30 ps, and 5 ns. The micromachining produced by the fs laser pulses was found to be much more controllable and reproducible than the longer pulses and produced much less damage in the material.

引用

页码：367 / 373

页数：7

共 21 条

[1]

Ashkenasi D, 1996, APPL PHYS A-MATER, V63, P103

[2]

ASHKENASI D, UNPUB APPL SURF SCI

[3]

Bauerle D., 2011, LASER PROCESSING CHE, V4

[4]

Chichkov BN, 1996, APPL PHYS A-MATER, V63, P109, DOI 10.1007/BF01567637

[5] LASER-INDUCED BREAKDOWN BY IMPACT IONIZATION IN SIO2 WITH PULSE WIDTHS FROM 7 NS TO 150 FS [J].

DU, D ;

LIU, X ;

KORN, G ;

SQUIER, J ;

MOUROU, G .

APPLIED PHYSICS LETTERS, 1994, 64 (23) :3071-3073

[6] REDUCTION PHOTOLITHOGRAPHY BY ABLATION AT WAVELENGTH 193-NM [J].

GOODALL, FN ;

MOODY, RA ;

WELFORD, WT .

OPTICS COMMUNICATIONS, 1986, 57 (04) :227-229

[7] KRF LASER-INDUCED ABLATION AND PATTERNING OF Y-BA-CU-O FILMS [J].

HEITZ, J ;

WANG, XZ ;

SCHWAB, P ;

BAUERLE, D ;

SCHULTZ, L .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (05) :2512-2514

[8]

Herbst G, 1996, MATER RES SOC SYMP P, V397, P69

[9]

HERBST G, COMMUNICATION

[10] NANOSECOND AND FEMTOSECOND EXCIMER LASER ABLATION OF FUSED-SILICA [J].

IHLEMANN, J ;

WOLFF, B ;

SIMON, P .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 54 (04) :363-368

← 1 2 3 →