Diamond-like carbon film deposition on PZT ferroelectrics and YBCO superconducting films using KrF excimer laser deposition

被引：3

作者：

Ebihara, K ^{[1
]}

Mitsugi, F ^{[1
]}

Yamazato, M ^{[1
]}

Yamagata, Y ^{[1
]}

机构：

[1] Kumamoto Univ, Dept Elect & Comp Engn, Kumamoto 860, Japan

来源：

COMPOSITES PART B-ENGINEERING | 1999年 / 30卷 / 07期

关键词：

diamond-like carbon;

D O I：

10.1016/S1359-8368(99)00033-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ferroelectric PbZr0.52Ti0.48O3 (PZT) and superconducting YBa2Cu3O7-x (YBCO) thin films were coated by unhydrogenated diamond-like carbon (DLC) films in order to reduce the aging degradation. Excimer laser ablation technique is applied to prepare PZT, YBCO and DLC films. The 60 days aging degradation of the DLC coated YBCO structure is limited within only 10% decay of normal resistivity. The polarization-electric field characteristics of the ferroelectric capacitor Au/PZT/YBCO/MgO shows a remanent polarization of 23.2 mu C/cm(2) and a coercive field of 54.0 kV/cm. At least 10% decay of these ferroelectric values was observed after 60 days exposure to atmosphere. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：685 / 689

页数：5

共 8 条

[1] Optical emission study of the laser plasma plume produced during diamondlike carbon thin film preparation [J].

Aoqui, S ;

Ikegami, T ;

Yamagata, Y ;

Ebihara, K .

THIN SOLID FILMS, 1998, 316 (1-2) :40-44

[2]

AOQUI S, 1995, P 12 INT C PLASM CHE, V4, P2173

[3] VAPOR-DEPOSITION PROCESSES FOR AMORPHOUS-CARBON FILMS WITH SP3 FRACTIONS APPROACHING DIAMOND [J].

CUOMO, JJ ;

PAPPAS, DL ;

BRULEY, J ;

DOYLE, JP ;

SAENGER, KL .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (03) :1706-1711

[4] Y-Ba-Cu-O thick film preparation using multistep KrF excimer laser deposition [J].

Ebihara, K ;

Shingai, K ;

Yamagata, Y ;

Ikegami, T ;

Grishin, AM .

JOURNAL OF ALLOYS AND COMPOUNDS, 1997, 251 (1-2) :228-231

[5] Preparation of PbZrxTi1-xO3 thin films by KrF excimer laser ablation technique [J].

Kurogi, H ;

Yamagata, Y ;

Ikegami, T ;

Ebihara, K ;

Tong, BY .

FERROELECTRIC THIN FILMS V, 1996, 433 :237-242

[6] Deposition of n-type diamondlike carbon by using the layer-by-layer technique and its electron emission properties [J].

Park, KC ;

Moon, JH ;

Chung, SJ ;

Jang, J ;

Oh, MH ;

Milne, WI .

APPLIED PHYSICS LETTERS, 1997, 70 (11) :1381-1383

[7] FATIGUE AND RETENTION IN FERROELECTRIC Y-BA-CU-O/PB-ZR-TI-O/Y-BA-CU-O HETEROSTRUCTURES [J].

RAMESH, R ;

CHAN, WK ;

WILKENS, B ;

GILCHRIST, H ;

SANDS, T ;

TARASCON, JM ;

KERAMIDAS, VG ;

FORK, DK ;

LEE, J ;

SAFARI, A .

APPLIED PHYSICS LETTERS, 1992, 61 (13) :1537-1539

[8] ELECTRON-EMISSION FROM FERROELECTRIC MATERIALS [J].

ROSENMAN, G ;

REZ, I .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (04) :1904-1908

← 1 →