Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces

被引:6
作者
Chen, YJ
Wilson, IH
Lee, CS
Xu, JB
Yu, ML
机构
[1] CHINESE UNIV HONG KONG,MAT TECHNOL RES CTR,SHATIN,HONG KONG
[2] HONG KONG UNIV SCI & TECHNOL,DEPT PHYS,KOWLOON,HONG KONG
[3] HONG KONG UNIV SCI & TECHNOL,MAT CHARACTERIZAT & PREPARAT FACIL,KOWLOON,HONG KONG
关键词
D O I
10.1063/1.366454
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this communication, we present a study of tip artifacts in atomic force microscope images of nanometer-scale cellular structures created on germanium surfaces by ion bombardment. It is demonstrated that the appearance of a columnar/granular morphology is due to severe image distortion when the tip size is comparable with the mean cell/hole diameter. These tip artifacts can often be deconvoluted by inverting the image and the lateral extension of the cell/hole can be reproduced with reasonable accuracy. (C) 1997 American Institute of Physics.
引用
收藏
页码:5859 / 5861
页数:3
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