Electro-optical properties of diamond thin films as UV photodetectors

被引：14

作者：

Pace, E

Galluzzi, F

Rossi, MC

Salvatori, S

Marinelli, M

Paroli, P

机构：

[1] UNIV ROMA 3,DIPARTIMENTO INGN ELETTR,I-00146 ROME,ITALY

[2] UNIV ROMA TOR VERGATA,INFM,DIPARTIMENTO SCI & TECNOL FIS ENERGET,I-00133 ROME,ITALY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1997年 / 387卷 / 1-2期

关键词：

CVD-diamond; UV photodetector;

D O I：

10.1016/S0168-9002(96)01001-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Optoelectronic properties of CVD-diamond thin films grown on silicon have been investigated in order to study the applications of diamond as active material for UV and soft X-ray photodetectors. A comparison of electrical and photoelectrical properties between diamond films grown by hot filament and microwave plasma enhanced CVD techniques is reported, discussing the role of the film morphology and the device geometry.

引用

页码：255 / 258

页数：4

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