Application of nanocrystalline Fe (or Co-Fe)-Hf-O magnetic films with high electrical resistivity to micro DC-DC converters

被引:22
作者
Sato, T [1 ]
Komai, E [1 ]
Yamasawa, K [1 ]
Hatanai, T [1 ]
Makino, A [1 ]
机构
[1] ALPS ELECT CO LTD,CENT RES LAB,NAGAOKA,NIIGATA 940,JAPAN
关键词
D O I
10.1109/20.617927
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High resistivity magnetic films, such as reactive sputtered Fe-Hf-O and Co-Fe-Hf-O, were applied to multilayered micro reactors for high frequency operation de-de converters. For a comparison, an amorphous Co-Ta-Hf film with good soft magnetic properties was also investigated. The micro reactor had the highest quality factor(the lowest loss) when using Co-Fe-Hf-O film with the highest resistivity. In 5MHz operation of de-de converters using these micro reactors, the highest conversion efficiency was obtained when using Co-Fe-Hf-O film.
引用
收藏
页码:3310 / 3312
页数:3
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