Wafer-Level Patterned and Aligned Polymer Nanowire/Micro- and Nanotube Arrays on any Substrate

被引：55

作者：

Morber, Jenny Ruth ^{[1
]}

Wang, Xudong ^{[1
]}

Liu, Jin ^{[1
]}

Snyder, Robert L. ^{[1
]}

Wang, Zhong Lin ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA

来源：

ADVANCED MATERIALS | 2009年 / 21卷 / 20期

关键词：

TRANSISTOR ARRAYS; GROWTH; ACTUATORS; NANOMATERIALS; MECHANISM;

D O I：

10.1002/adma.200803648

中图分类号：

O6 [化学];

学科分类号：

070301 [无机化学];

摘要：

A novel technique for fabrication of patterned and aligned polymer-nanowire/micro- and nanotube (PNW/PNT) arrays on a wafer-level substrate of any material is reported. By creating a designed pattern on a spin-coated polymer film using techniques, such as stamping or micro-tip writing, plasma etching results in the formation of aligned PNW arrays distributed according to the pattern.

引用

页码：2072 / 2076

页数：5

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