Temperature, humidity and gas sensors integrated on plastic foil for low power applications

被引：122

作者：

Oprea, A. ^{[1
]}

Courbat, J. ^{[2
]}

Barsan, N. ^{[1
]}

Briand, D. ^{[2
]}

de Rooij, N. F. ^{[2
]}

Weimar, U. ^{[1
]}

机构：

[1] Univ Tubingen, Inst Phys & Theoret Chem, D-72076 Tubingen, Germany

[2] EPFL, Inst Microbiol, SAMLAB, Neuchatel, Switzerland

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2009年 / 140卷 / 01期

关键词：

Integrated sensors platforms; Plastic substrate; Capacitive gas sensor; Ultra-low power; Mobile applications; Smart RFID; RADIO-FREQUENCY IDENTIFICATION; CHEMICAL SENSORS; SEMICONDUCTOR; POLYMERS; SORPTION; VAPOR; DESIGN; SYSTEM;

D O I：

10.1016/j.snb.2009.04.019

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Temperature, gas and humidity resistive/capacitive sensors on plastic substrates, suitable for mobile applications, like smart RFID tags, have been produced and investigated. The sensor concept is providing simple, versatile and low power Solutions for temperature, humidity and gas detection. The device structure was devised together with the data evaluation strategies based on the latest generation EA analog (resistance and capacitance) to digital converters. The possibility of developing gas sensors on humidity sensitive substrates, having temperature corrected responses is demonstrated. The proposed sensor is aimed to evolve towards "flexible and full plastic" implementations. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：227 / 232

页数：6

共 45 条

[1]

ATKINS PW, 1999, PHYS CHEM

[2] Generic architectures and design methods for autonomous sensors [J].

Bracke, W. ;

Merken, P. ;

Puers, R. ;

Van Hoof, C. .

SENSORS AND ACTUATORS A-PHYSICAL, 2007, 135 (02) :881-888

[3] Capacitive-type chemical sensors using thin silicon/polymer bimorph membranes [J].

Chatzandroulis, S ;

Tegou, E ;

Goustouridis, D ;

Polymenakos, S ;

Tsoukalas, D .

SENSORS AND ACTUATORS B-CHEMICAL, 2004, 103 (1-2) :392-396

[4] A 5.1-μW UHF RFID tag chip integrated with sensors for wireless environmental monitoring [J].

Cho, N ;

Song, SJ ;

Kim, S ;

Yoo, HJ .

ESSCIRC 2005: PROCEEDINGS OF THE 31ST EUROPEAN SOLID-STATE CIRCUITS CONFERENCE, 2005, :279-282

[5] CAPACITIVE SENSORS IN CMOS TECHNOLOGY WITH POLYMER COATING [J].

CORNILA, C ;

HIERLEMANN, A ;

LENGGENHAGER, R ;

MALCOVATI, P ;

BALTES, H ;

NOETZEL, G ;

WEIMAR, U ;

GOPEL, W .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) :357-361

[6] OPTIMIZATION OF THE GEOMETRY OF GAS-SENSITIVE INTERDIGITAL CAPACITORS [J].

ENDRES, HE ;

DROST, S .

SENSORS AND ACTUATORS B-CHEMICAL, 1991, 4 (1-2) :95-98

[7] A GAS SENSOR SYSTEM WITH DIELECTRIC AND MASS SENSORS [J].

ENDRES, HE ;

MICKLE, LD ;

KOSSLINGER, C ;

DROST, S ;

HUTTER, F .

SENSORS AND ACTUATORS B-CHEMICAL, 1992, 6 (1-3) :285-288

[8] SOLUBILITY INTERACTIONS AND THE DESIGN OF CHEMICALLY SELECTIVE SORBENT COATINGS FOR CHEMICAL SENSORS AND ARRAYS [J].

GRATE, JW ;

ABRAHAM, MH .

SENSORS AND ACTUATORS B-CHEMICAL, 1991, 3 (02) :85-111

[9] Selective vapor sorption by polymers and cavitands on acoustic wave sensors: Is this molecular recognition? [J].

Grate, JW ;

Patrash, SJ ;

Abraham, MH ;

Du, CM .

ANALYTICAL CHEMISTRY, 1996, 68 (05) :913-917

[10] CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors [J].

Hagleitner, C ;

Lange, D ;

Hierlemann, A ;

Brand, O ;

Baltes, H .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2002, 37 (12) :1867-1878

← 1 2 3 4 5 →