Capacitive-type chemical sensors using thin silicon/polymer bimorph membranes

被引：20

作者：

Chatzandroulis, S ^{[1
]}

Tegou, E ^{[1
]}

Goustouridis, D ^{[1
]}

Polymenakos, S ^{[1
]}

Tsoukalas, D ^{[1
]}

机构：

[1] NCSR Demokritos, Inst Microelect, GR-15310 Athens, Greece

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2004年 / 103卷 / 1-2期

关键词：

chemical sensor; bimorph; capacitive; selective layers; humidity;

D O I：

10.1016/j.snb.2004.04.078

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Capacitive-type chemical sensing devices based on a silicon/polymer bimorph structure have been fabricated and evaluated. Upon exposure to analytes, the polymer covering the thin silicon membrane swells, inducing a deflection on the membrane, which is measured as a capacitance change between membrane and substrate. Five different polymer layers [poly-hydroxy-ethyl-methacrylate (PHEMA), poly-methyl-methacrylate (PMMA), poly-vinyl-acetate (PVAc), epoxydized novolac (EPN) and poly-dimethylsiloxane (PDMS)] were used. Exposure to water, methanol and ethanol vapors was used for evaluating performance. Sensitivities ranging from 4.5 fF/%RH for PDMS to 29 fF/%RH for PHEMA-covered devices are reported. Devices covered with PHEMA, PVAc and PMMA also exhibit strong response upon exposure to methanol and ethanol atmospheres. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：392 / 396

页数：5

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