Environmental sensors based on micromachined cantilevers with integrated read-out

被引：236

作者：

Boisen, A ^{[1
]}

Thaysen, J ^{[1
]}

Jensenius, H ^{[1
]}

Hansen, O ^{[1
]}

机构：

[1] Tech Univ Denmark, Mikroelekt Ctr, DK-2800 Lyngby, Denmark

来源：

ULTRAMICROSCOPY | 2000年 / 82卷 / 1-4期

关键词：

atomic force microscopy; probe; cantilever based sensor; piezoresistive; integrated read-out; thermal sensor; humidity sensor; alcohol sensor in water; symmetrical Wheatstone bridge;

D O I：

10.1016/S0304-3991(99)00148-5

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：11 / 16

页数：6

共 14 条

[1] PHOTOTHERMAL SPECTROSCOPY WITH FEMTOJOULE SENSITIVITY USING A MICROMECHANICAL DEVICE [J].

BARNES, JR ;

STEPHENSON, RJ ;

WELLAND, ME ;

GERBER, C ;

GIMZEWSKI, JK .

NATURE, 1994, 372 (6501) :79-81

[2] Thermal analysis using a micromechanical calorimeter [J].

Berger, R ;

Gerber, C ;

Gimzewski, JK ;

Meyer, E ;

Guntherodt, HJ .

APPLIED PHYSICS LETTERS, 1996, 69 (01) :40-42

[3] Micromechanical thermogravimetry [J].

Berger, R ;

Lang, HP ;

Gerber, C ;

Gimzewski, JK ;

Fabian, JH ;

Scandella, L ;

Meyer, E ;

Guntherodt, HJ .

CHEMICAL PHYSICS LETTERS, 1998, 294 (4-5) :363-369

[4] Surface stress in the self-assembly of alkanethiols on gold [J].

Berger, R ;

Delamarche, E ;

Lang, HP ;

Gerber, C ;

Gimzewski, JK ;

Meyer, E ;

Guntherodt, HJ .

SCIENCE, 1997, 276 (5321) :2021-2024

[5]

CHUI BW, 1996, SOL STAT SENS ACT WO, P219

[6] OBSERVATION OF A CHEMICAL-REACTION USING A MICROMECHANICAL SENSOR [J].

GIMZEWSKI, JK ;

GERBER, C ;

MEYER, E ;

SCHLITTLER, RR .

CHEMICAL PHYSICS LETTERS, 1994, 217 (5-6) :589-594

[7] The nanomechanical NOSE [J].

Lang, HP ;

Baller, MK ;

Battiston, FM ;

Fritz, J ;

Berger, R ;

Ramseyer, JP ;

Fornaro, P ;

Meyer, E ;

Güntherodt, HJ ;

Brugger, J ;

Drechsler, U ;

Rothuizen, H ;

Despont, M ;

Vettiger, P ;

Gerber, C ;

Gimzewski, JK .

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :9-13

[8] A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors [J].

Lang, HP ;

Berger, R ;

Battiston, F ;

Ramseyer, JP ;

Meyer, E ;

Andreoli, C ;

Brugger, J ;

Vettiger, P ;

Despont, M ;

Mezzacasa, T ;

Scandella, L ;

Guntherodt, HJ ;

Gerber, C ;

Gimzewski, JK .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 66 (Suppl 1) :S61-S64

[9] Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers [J].

Linnemann, R ;

Gotszalk, T ;

Rangelow, IW ;

Dumania, P ;

Oesterschulze, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (02) :856-860

[10] Micromechanical thermal sensors: Comparison of experimental results and simulations [J].

Moulin, AM ;

Stephenson, RJ ;

Welland, ME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (03) :590-596

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