Environmental sensors based on micromachined cantilevers with integrated read-out

被引：236

作者：

Boisen, A ^{[1
]}

Thaysen, J ^{[1
]}

Jensenius, H ^{[1
]}

Hansen, O ^{[1
]}

机构：

[1] Tech Univ Denmark, Mikroelekt Ctr, DK-2800 Lyngby, Denmark

来源：

ULTRAMICROSCOPY | 2000年 / 82卷 / 1-4期

关键词：

atomic force microscopy; probe; cantilever based sensor; piezoresistive; integrated read-out; thermal sensor; humidity sensor; alcohol sensor in water; symmetrical Wheatstone bridge;

D O I：

10.1016/S0304-3991(99)00148-5

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：11 / 16

页数：6