MEMS-based embedded sensor virtual components for system-on-a-chip (SoC)

被引：43

作者：

Afridi, M

Hefner, A

Berning, D

Ellenwood, C

Varma, A

Jacob, B

Semancik, S

机构：

[1] Natl Inst Stand & Technol, Semicond Elect Div, Gaithersburg, MD 20899 USA

[2] Univ Maryland, College Pk, MD USA

[3] Natl Inst Stand & Technol, Proc Measurements Div, Gaithersburg, MD 20899 USA

来源：

SOLID-STATE ELECTRONICS | 2004年 / 48卷 / 10-11期

关键词：

MEMS; CMOS; gas sensor; microhotplate; virtual component; SoC;

D O I：

10.1016/j.sse.2004.05.012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design and implementation of a monolithic micro electro mechanical systems (MEMS)-based gas sensor virtual component is described. The gas sensor virtual component encloses the sensor and its associated analog circuitry into a digital shell so that all interface connections to the virtual component are digital. The system architecture supports an array of gas sensor elements. System response time is limited by the sensor and is complex. Example gas sensor characterization results are presented showing isothermal response to carbon monoxide molecules with detection sensitivity better than 100 nanomoles/mole. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：1777 / 1781

页数：5

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