High performance slit-less spectrometer for soft x-ray emission spectroscopy

被引：48

作者：

Tokushima, T.

Harada, Y.

Ohashi, H.

Senba, Y.

Shin, S.

机构：

[1] SPring 8, RIKEN, Sayo, Hyogo 6795148, Japan

[2] SPring 8, JASRI, Sayo, Hyogo 6795198, Japan

[3] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2006年 / 77卷 / 06期

关键词：

D O I：

10.1063/1.2204623

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/Delta E) is expected using a focused beam whose spot size is 5 mu m full width at half maximum in the vertical direction. A distortion of the linear profile of the focused image on the charge-coupled device (CCD) detector is successfully removed by using a cylindrical grating. This enabled us to apply a super-resolution reconstruction technique to compensate for the lack of spatial resolution of the CCD detector.

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页数：5

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