Optical properties of oxygenated amorphous cadmium telluride thin films

被引：17

作者：

ElAzhari, MY ^{[1
]}

Azizan, M ^{[1
]}

Bennouna, A ^{[1
]}

Outzourhit, A ^{[1
]}

Ameziane, EL ^{[1
]}

Brunel, M ^{[1
]}

机构：

[1] CNRS,CRISTALLOG LAB,F-38042 GRENOBLE,FRANCE

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1997年 / 45卷 / 04期

关键词：

RF sputtering; a-CdTe:O thin films; optical constants; X-ray reflectometry;

D O I：

10.1016/S0927-0248(96)00080-3

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Oxygenated cadmium telluride (CdTe:O) thin films are prepared by radio-frequency (RF) sputtering from a polycrystalline CdTe target in an atmosphere composed of a mixture of argon, nitrogen and oxygen gases. X-ray diffraction analysis showed that as-deposited films are amorphous when deposited in the presence of nitrogen. X-ray photoelectron spectroscopy analysis revealed that the layers do not contain any nitrogen while the chemical composition of the films depends strongly on the partial pressure of N-2 used during sputtering. Finally, optical transmission measurements in the IR-Visible region showed that the optical constants of the samples vary considerably with their oxygen contents. X-ray reflectometry studies enabled us to correlate some of these variations with the density of the layers.

引用

页码：341 / 352

页数：12

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