3-D-micro-ERDA microscopy of trace hydrogen distributions in diamond using a 2-D-PSD with event reconstruction

被引：15

作者：

Doyle, BP ^{[1
]}

Maclear, RD ^{[1
]}

Connell, SH ^{[1
]}

Formenti, P ^{[1
]}

Machi, IZ ^{[1
]}

Butler, JE ^{[1
]}

Schaaff, P ^{[1
]}

Sellschop, JPF ^{[1
]}

SiderasHaddad, E ^{[1
]}

BharuthRam, K ^{[1
]}

机构：

[1] UNIV DURBAN WESTVILLE,DEPT PHYS,ZA-4000 DURBAN,SOUTH AFRICA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1997年 / 130卷 / 1-4期

关键词：

D O I：

10.1016/S0168-583X(97)00367-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A fast-imaging technique for the total elemental hydrogen concentration distribution is described, which is helpful in the study of its chemistry and dynamics in the diamond system. The micro-scanned Heavy-Ion Elastic Recoil Detection Analysis (HI-ERDA) technique can deliver information on hydrogen distributions in three dimensions. In our system, the count rate is enhanced by use of a 2-D position and energy sensitive detector for the hydrogen recoils. Software geometry collimation and recoil energy rebinning ensure that the increased rate is in fact accompanied by an improvement in effective energy resolution. The system has been used to study the mobility and trapping behaviour of a collimated implant of hydrogen into a pre-damaged natural type IIa diamond sample as well as the mobility and trapping behaviour of collimated implants of hydrogen into diamond, which has not been pre-damaged. (C) 1997 Elsevier Science B.V.

引用

页码：204 / 210

页数：7

共 30 条

[1] The Schonland Micro-Scanning Ion Beam Analysis Facility [J].

Andeweg, AH ;

Ballestrero, S ;

Beer, JUM ;

Butler, JE ;

Breese, MBH ;

Connell, SH ;

Dini, L ;

Doyle, BP ;

Drummond, ML ;

Formenti, P ;

Hart, RJ ;

Machi, IZ ;

Maclear, RD ;

McQueen, ID ;

Schaaff, P ;

SiderasHaddad, E ;

Sellschop, JPF ;

Wernick, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 130 (1-4) :37-44

[2] ERDA with very heavy ion beams [J].

Assmann, W ;

Davies, JA ;

Dollinger, G ;

Forster, JS ;

Huber, H ;

REichelt, T ;

Siegele, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 118 (1-4) :242-250

[3] STUDY OF HYDROGEN IN DLC FILM BY ERDA WITH NI-58 IONS [J].

AVASTHI, DK ;

KABIRAJ, D ;

JAIPAL ;

MEHTA, GK ;

BARSHILIA, HC ;

SAH, S ;

MEHTA, BR ;

VANKAR, VD .

VACUUM, 1995, 46 (07) :633-636

[4]

BALLESTRERO S, PORT PAW PLUS PLUS L

[5] EFFECTS OF OXYGEN AND HYDROGEN ADSORPTION ON THE ELECTRON-ENERGY-LOSS FEATURES OF DIAMOND SURFACES [J].

BEERLING, TE ;

HELMS, CR .

APPLIED PHYSICS LETTERS, 1994, 65 (15) :1912-1914

[6] ELASTIC RECOIL DETECTION [J].

BIK, WMA ;

HABRAKEN, FHPM .

REPORTS ON PROGRESS IN PHYSICS, 1993, 56 (07) :859-902

[7] THIN-FILM DIAMOND GROWTH MECHANISMS [J].

BUTLER, JE ;

WOODIN, RL .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1993, 342 (1664) :209-224

[8]

BUTLER JE, 1996, COMMUNICATION

[9] 3D-micro-ERDA microscopy of implanted H-distributions in diamond [J].

Connell, SH ;

SiderasHaddad, E ;

Smallman, CG ;

Sellschop, JPF ;

Machi, IZ ;

BharuthRam, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 118 (1-4) :332-337

[10]

*DEC LAB LTD, CONTRAD

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