STUDY OF HYDROGEN IN DLC FILM BY ERDA WITH NI-58 IONS

被引：42

作者：

AVASTHI, DK ^{[1
]}

KABIRAJ, D ^{[1
]}

JAIPAL ^{[1
]}

MEHTA, GK ^{[1
]}

BARSHILIA, HC ^{[1
]}

SAH, S ^{[1
]}

MEHTA, BR ^{[1
]}

VANKAR, VD ^{[1
]}

机构：

[1] INDIAN INST TECHNOL,DEPT PHYS,THIN FILM LAB,NEW DELHI 110016,INDIA

来源：

VACUUM | 1995年 / 46卷 / 07期

关键词：

D O I：

10.1016/0042-207X(95)00004-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The content of hydrogen and its depth profile in diamond like carbon (DLC) films deposited by the microwave plasma deposition technique is determined by Elastic Recoil Detection Analysis (ERDA) using 85 MeV Ni-58 ions. Simultaneous defection of hydrogen and carbon recoils provided a method to determine the relative number of hydrogen:carbon atoms without using a standard H sample for quantitative calibration.

引用

页码：633 / 636

页数：4

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